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. 2022 Apr 19;13:2121. doi: 10.1038/s41467-022-29802-7

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© The Author(s) 2022

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this licence, visit http://creativecommons.org/licenses/by/4.0/.

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Fig. 1 — a Vision of the IMOS devices for e-skin application. Conceptual images illustrating the application of the IMOS device in the hair-inspired sensation system for mechanoreception. The stray field strength and direction of the hair-attached small magnets would be changed due to bending of the hair, which is detectable by the IMOS device. b Deterministic self-folding process. Illustration of the self-folding micro-origami process. Orthogonal folding is obtained due to the rational design of the layout and the hinges. c Layout design of the self-foldable platform. Exploded schematic of the layout for the self-foldable polymeric platform with embedded electronics and integrated active matrix driving circuitry. The embedded electronics and the a-IGZO active matrix backplane are interconnected through via holes. d One pixel in the 3D sensor. Image of a single pixel which is composed of a self-folded polymer cube containing three sensors located on the orthogonal planes. The side length of the cube is 400 µm. Scale bar, 200 µm.