Skip to main content
. 2022 Apr 7;13(4):581. doi: 10.3390/mi13040581

Figure 6.

Figure 6

Out-of-plane XRD patterns of the (a) AlN and (b) AlScN thin films obtained for the (002) peak under varying DC voltages; The d33,f linear fit results of (c) AlN and (d) AlScN thin films.