Table 1.
The simulation parameter range settings.
| Material | Range of d31 [pm/V] | Range of d33 [pm/V] | Step Length [pm/V] |
|---|---|---|---|
| AlN | −3.18 to −0.98 | 3.18 to 6.36 | 0.1 |
| AlScN | −5.18 to −2.98 | 5.18 to 10.28 | 0.1 |
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