Table 2.
Input parameters of the simulation model for the FEM.
| Layer | Material | Thickness [nm] | Gap | Width [μm] |
|---|---|---|---|---|
| 1 | Au | 200 nm | a | 250 μm |
| 2 | Mo | 200 nm | b | 125 μm |
| 3 | AlN/AlScN | 1.36 μm/1.09 μm | c | 125 μm |
| 4 | Mo | 200 nm | / | / |
| 5 | Si | 450 μm | / | / |
| 6 | Al | 2 mm | / | / |
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