Table 4.
The material and thickness of each layer used in the calculation of the cantilever.
| Layer | Material | Thickness | Width (W) |
|---|---|---|---|
| 1 | Mo | 200 [nm] | 35 [μm] |
| 2 | AlN (AlScN) | 1.36 [μm] (1.09 [μm]) | 35 [μm] |
| 3 | Mo | 200 [nm] | 35 [μm] |
| 4 | Si | 30 [μm] | 35 [μm] |
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