Table 5.
Comparison of different test methods.
| Cantilever Method [pm/V] | In-Situ XRD [pm/V] | LDV-FEM [pm/V] | |
|---|---|---|---|
| AlN d33,f | / | 3.335 | 3.061 |
| AlN d31 | −1.68 | / | −1.7 |
| AlScN d33,f | / | 7.560 | 7.22 |
| AlScN d31 | −3.89 | / | −4.0 |
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