Table 1.
Number of layers with film thickness, ASR, and porosity.
Symmetrical Cell | Number of Layers | Film Thickness (µm) | Porosity (%) |
ASR (Ωcm2) |
---|---|---|---|---|
9SFT-1SDC (1×) | 1 | 6.42 | 21.52 | 1.25 |
9SFT-1SDC (3×) | 3 | 13.40 | 23.00 | 0.65 |
9SFT-1SDC (5×) | 5 | 19.54 | 25.59 | 0.22 |
9SFT-1SDC (7×) | 7 | 25.60 | 22.87 | 0.12 |
9SFT-1SDC (9×) | 9 | 30.95 | 13.98 | 2.95 |