Table 3.
Sensitivity of the transduction geometries.
| Sensitivity of fabricated sensors | |
|---|---|
| Transduction geometry | Sensitivity pF/%RH |
| Meander | 2.37 |
| Archimedes spiral | 0.13 |
| Serpentine | 0.84 |
| Interdigital | 1.06 |
| Rectangular spiral | 0.31 |
| Custom | 0.88 |
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