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. 2020 Feb 27;10(15):8594–8617. doi: 10.1039/d0ra00016g

Properties of metal oxides based pH sensors for wearable/flexible electrochemical sensor fabrication.

Material Fabrication Substrate pH range Response time Sensitivity (mV pH−1) Flexibility Ref.
IrO2 Sputtering PET 4–7 61 ± 1 195
IrO2 Electrodeposition PI 4–9 0.5 s 69.9 ± 2.2 184
IrO2 Sol–gel PI 1.5–12 0.9 to 2 s 51 Tested in a tube with a 1 cm curvature radius 196
CuO nanorectangle Hydrothermal synthesis PET 5–8.5 0.64 μF pH−1 Tested in a tube with a 5 mm curvature radius 22
ZnO nanowalls Low temperature PI 1–9 ∼59 197
Polycrystalline silicon thin film transistor technology
IZO Sputtering PET 4–10 5 ms 105 Tested by bending around a cylinder with a 1.0 cm curvature radius 198
ITO Radio frequency sputtering and a roll-to-roll process PET 2–12 50.1 199
InGaZnO Sputtering and thin film transistor technology PI 3.3–11 51.2 Tested as a function of bending with up to 13 mm curvature radius 185
WO3 nanoparticle Electrodeposition PI 5–9 23–28 s −56.7 ± 1.3 186