Properties of metal oxides based pH sensors for wearable/flexible electrochemical sensor fabrication.
Material | Fabrication | Substrate | pH range | Response time | Sensitivity (mV pH−1) | Flexibility | Ref. |
---|---|---|---|---|---|---|---|
IrO2 | Sputtering | PET | 4–7 | — | 61 ± 1 | — | 195 |
IrO2 | Electrodeposition | PI | 4–9 | 0.5 s | 69.9 ± 2.2 | — | 184 |
IrO2 | Sol–gel | PI | 1.5–12 | 0.9 to 2 s | 51 | Tested in a tube with a 1 cm curvature radius | 196 |
CuO nanorectangle | Hydrothermal synthesis | PET | 5–8.5 | — | 0.64 μF pH−1 | Tested in a tube with a 5 mm curvature radius | 22 |
ZnO nanowalls | Low temperature | PI | 1–9 | — | ∼59 | — | 197 |
Polycrystalline silicon thin film transistor technology | |||||||
IZO | Sputtering | PET | 4–10 | 5 ms | 105 | Tested by bending around a cylinder with a 1.0 cm curvature radius | 198 |
ITO | Radio frequency sputtering and a roll-to-roll process | PET | 2–12 | — | 50.1 | — | 199 |
InGaZnO | Sputtering and thin film transistor technology | PI | 3.3–11 | — | 51.2 | Tested as a function of bending with up to 13 mm curvature radius | 185 |
WO3 nanoparticle | Electrodeposition | PI | 5–9 | 23–28 s | −56.7 ± 1.3 | — | 186 |