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. 2020 May 27;10(34):20302–20312. doi: 10.1039/d0ra02693j

XPS derived elemental composition of pristine and modified silicon wafersa.

Sample Atom%
C O N S Si
Pristine 4.4 44.8 — — 50.8
APTES 13.9 40.9 2.7 — 42.5
CTA 26.9 38.2 5.8 2.2 27
1 layer pCB 50 23.9 4.3 2.1 19.7
a

1 layer pCB had a thickness of 12.6 ± 2.7 nm.