Atomic content and thickness of CoSb₃ doped Te thin films (T1, T2, T3 and T4).

	Co content (at%)	Sb content (at%)	Te content (at%)	Thickness (nm)
T1	19.89	80.11	—	940
T2	20.29	76.47	3.24	951
T3	18.20	69.58	12.22	1002
T4	15.82	62.04	22.14	1123