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| Measurement | O 1s | Al 2p | P 2p | Mo 3d5/2 | ||
|---|---|---|---|---|---|---|
| O salt | O oxide | Al(iii) | P(v) | Mo(v) | Mo(vi) | |
| Area 1 | 23.1 | 61.5 | 3.3 | 4.4 | 1.5 | 6.2 |
| Area 2 | 52.3 | 24.7 | 4.8 | 6.1 | 2.1 | 10.0 |
| Area 3 (pre-sputtered) | 58.5 | 15.4 | 5.4 | 8.6 | 0.5 | 11.6 |
