Displays effect of the Mg doping concentration on microstructural properties of ZnO thin films as estimated from XRD results.

Samples	ε	σ (GPa)	D (nm)	δ (line per nm)	N (nm−2)
MZO0	−1.152 × 10−3	−0.268	92.952	1.157 × 10−4	3.375 × 10−4
MZO1	−1.728 × 10−3	−0.402	87.684	1.300 × 10−4	4.450 × 10−4
MZO2	−2.112 × 10−3	−0.492	82.111	1.483 × 10−4	5.419 × 10−4
MZO3	−2.689 × 10−3	−0.626	78.517	1.622 × 10−4	6.197 × 10−4
MZO4	−3.073 × 10−3	−0.716	77.031	1.685 × 10−4	6.563 × 10−4
MZO5	−3.457 × 10−3	−0.805	73.053	1.873 × 10−4	7.964 × 10−4