Morphological parameters obtained from power spectrum.
| Sample description | Average PSD parameters | Rms roughness (nm) | ||
|---|---|---|---|---|
| D H | l (nm) | L (nm) | ||
| S_40s | 2.30 | 12.11 | 120.02 | 12.45 |
| E_100 cy | 2.62 | 17.23 | 150.45 | 17.52 |
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