Fig. 12. Schematic representation of: (a) piezoresistive and piezoelectric cilia sensors where the cilium structure may be attached to one or multiple sensors/elements arranged either in its base or within the cilium structure. The sensors may experience deflection like represented by the bent configuration A and B depending on their type of arrangement around the cilium structure. (b) A capacitance based sensor integrated in the cilium base may be triggered by the bending of the cilium in the same manner as shown for the piezo sensors (configuration A and B). (c) A GMR or GMI sensor is placed under the cilia made from a magnetic material. Minute change in the magnetic field due to the deflection of magnetic cilia bought about by the surrounding fluid flow or vibrations is sensed by the sensor placed in the base.