Sensing artificial cilia based on different sensing principles and with biggest feature size less than 1 mm are listed here. The list is sorted as per the cilia sizes, from smallest to largest. A more complete list is given in the ESI† Table S3.
| Ref. | Flow sensing principle | Material | Size* □: l × w × t μm, ○: l × d μm | Medium | Flow velocity | Flow measurement resolution |
|---|---|---|---|---|---|---|
| 185 | Magnetic | PPy NW | 1 × 0.08–0.2 | Air | — | — |
| 186 | Magnetic | Fe–Ga NW | 5 × 0.1 | Air | — | — |
| 179, 187 | Magnetic | Fe–Ga NW | 25–100 × 0.02–0.2 | Liquids | 400 Hz–10 kHz | — |
| 188 | Magnetic | Co NW | 50 × 0.7 | Water/air | 6 mL min−1 | 136 μL min−1 |
| 173 | Piezoelectric | SU-8 | 400–800 × 50 | Water | 1–5 Hz | — |
| 177 | Capacitive | SU-8 | 500 × 50 | Air | — | — |
| 180, 184 | Magnetic | Fe NW, PDMS/SU-8 | 500 × 100, 20 × 5 | Water | 0.6 m s−1 | 0.56 mm s−1 |
| 109 | Piezoresistive | SU8 | 600 × 80 | Air/water | — | <1 m s−1 |
| 165 | Piezoresistive | AlN3 + Mo | (200–600) × 100 × 0.7 | Water | 0.3 bar | 0.025 bar |
| 107 | Piezoresistive | — | 800 × 400 × 250 | Air | 10 s of cm s−1 to 2 m s−1 | — |
| 108 | Piezoresistive | Permalloy | 820 × 0–10 × 100 | Water | 1 m s−1 | — |
| 176 | Capacitive | SU-8 | 900 × 50 | Air | — | — |
| 189 | Piezoresistive | Red wax | 1000 × 100 × 40 | Water | — | 184.2 dB |
| 190 | Magnetic | Fe–Ga NW | — × 0.001–0.1 | Air | 300 Hz–5 kHz | — |
| 172 | Piezoelectric | PVDF | — × 25 | Air | — | — |
| 175 | Capacitive | SU-8 | 1000 × — | Air | 0.1–1 m s−1 | — |