Fig. 2. P-polarized reflection spectra using FTIR spectroscopy during transition after (a) CF4 and O2 RIE, followed by (b) O2 plasma, and (c) calcination at 450 °C.
Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.