Fig. 4. 2-mm-diameter polychromatic polarization-insensitive metalenses (NA = 0.3 and 0.7).
a SEM image of the fabricated metalens with NA = 0.3. The scale bar is 10 µm. The inset is a zoomed-in tilted view. The scale bar is 400 nm. b Simulations of normalized focal intensity distribution along the optical axis at six design wavelengths (NA = 0.3). c Measured focal intensity distribution in the XZ plane at six wavelengths (NA = 0.3). d Measured full-width-half-maximums (FWHMs) of the focal spots at six design wavelengths in comparison with ideal Airy function profile (NA = 0.3 and 0.7). e–j Measured focal plane intensity distribution at the design wavelengths (NA = 0.3).