Fig. 2. (a) Scanning electron microscopy (SEM) and (b) atomic force microscopy (AFM) images, and (c) RMS roughness of MoS₂ nanosheets with ZnO nanopatches as a function of the process cycles (0, 10, 20, 30, and 40 cycles) during ALD process. Picture of large-area MoS₂ and ZnO hybrid film on the 8 inch SiO₂ substrate (d) and the transferred MoS₂ nanosheets with ZnO nanopatches (40 cycles) (e). (f) Optical transmittance of ZnO–MoS₂ hybrid film on a PET (polyethylene terephthalate) substrate for diverse ALD cycles (0, 10, 20, 30, and 40 cycles).