Table 1. Factory characteristics of the new positioning parts used for the sub-micrometer setup on the Extreme Conditions Beamline (ECB).

The numbers in brackets refer to components in Fig. 5 ▸.

(1) XY stage with PILine piezo motors	25 mm × 25 mm travel range
	100 nm min. incremental motion
	10 nm sensor resolution
	7 N drive force, maximum load capacity 50 N
(2) PIglide RM air-bearing rotation stage	150 mm motion platform diameter
	50 mm travel length
	0.0015 µrad sensor resolution
	Absolute angle-measuring system
	Slot-less brushless three-phase torque motor
(3) HPS-170 high-precision linear stage	170 mm width, 52 mm travel range
	50 nm minimum incremental motion
	Stepper motor
	Linear encoder with sin/cos signal transmission
	Optical limit switches
	350 N load capacity