Flow rate and thickness control during iCVD coating synthesis.
| Stage | Flow rate/sccm | Thickness/nm | |||
|---|---|---|---|---|---|
| MAA | DMAEMA | EGDA | |||
| PME | I | 0.56 | 0 | 0.26 | 200 |
| II | 0.56 | 0 | 0 | 50 | |
| PDE | I | 0 | 0.55 | 0.28 | 200 |
| II | 0 | 0.55 | 0 | 50 | |
| PDME | I | 0.36 | 0.03 | 0.40 | 200 |
| II | 0.36 | 0.03 | 0 | 50 | |
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