Effective WVTR of Al2O3 with different thickness.
| Sample | Thickness (nm) | WVTR (g m−2 per day) |
|---|---|---|
| 1 | 15 | 6.7 × 10−3 |
| 2 | 20 | 0.7 × 10−3 |
| 3 | 30 | 0.8 × 10−3 |
| 4 | 50 | 1.3 × 10−3 |
| 5 | 60 | 4.7 × 10−3 |
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