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. 2018 Feb 2;8(11):5721–5727. doi: 10.1039/c8ra00023a

Change of WVTR with stretching and recovering process of various coating on pre-strain PDMS.

Coatings Initial WVTR (g m−2 per day) Final WVTR (g m−2 per day) Rising rate (%)
4 dyads 15 nm Al2O3/250 nm parylene C 5.4 8.2 51.9
2 dyads 30 nm Al2O3/500 nm parylene C 1.1 3.8 254
2 dyads 50 nm Al2O3/500 nm parylene C 1.5 9.3 534