Geometric dimensions of the trapping unit (all values are in μm).
| Length of each segment | Width of each segment | Depth | Arc radius | |||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| l a | l b | l c | l d | l e | l f | w a | w b | w c | w d | w e | w f | h | r 1 | r 2 |
| 2104 | 75 | 120 | 350 | 160 | 75 | 150 | 150 | 150 | 350 | 34 | 150 | 120 | 150 | 50 |
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