Fig. 1. Fabrication route of periodic alloyed nanospheres arrays. (a) Monolayer colloidal crystal template was made on quartz sheet by self-assembling method. (b) After magnetron sputtering deposition, the Au thin film was deposited onto the surface of colloidal monolayer. (c) Periodic Au spherical NPs arrays were formed by annealing at 1000 °C for 2 h at air atmosphere. (d) Ag thin film (i), Cu thin film (ii) and Ag–Cu complex film (iii) were deposited on the surface of periodic Au spherical NPs arrays by magnetron sputtering deposition technology. (e) After annealing in reducing atmosphere (N2 (96%), H2 (4%), volume ratio) at 750 °C for 2 h, Au–Ag(i), Au–Cu(ii) and Au–Ag–Cu(iii) alloyed NPs ordered arrays were fabricated.
