Residual mass at different temperature of PMKS/HPMDS system.

Sample	Residual mass at different temperature (%)
	400 °C	500 °C	600 °C	800 °C
S1	99.6	35.2	6.5	6
S3	98.9	77.2	13.3	12.9
S4	99.5	86.8	19.1	18.9
S5	98.8	87.3	23.9	21.8
S10	99.2	64.8	7.3	7.2