Resistivity of GZO films treated by excimer laser with different fluence and pulse counts. The resistivity of the films with heat treatment is 0.12 ± 0.01 Ω cm.
| Fluence (mJ cm−2) | Pulse count | Resistivity (Ω cm) |
|---|---|---|
| 0 | 0 | 71.98 ± 3.48 |
| 60 | 1 | 59.97 ± 2.65 |
| 5 | 9.05 ± 0.89 | |
| 10 | 1.15 ± 0.11 | |
| 20 | 0.17 ± 0.02 | |
| 30 | 0.19 ± 0.01 | |
| 40 | 0.19 ± 0.02 | |
| 75 | 1 | 13.90 ± 1.05 |
| 5 | 0.22 ± 0.04 | |
| 10 | 0.093 ± 0.015 | |
| 20 | 0.031 ± 0.008 | |
| 30 | 0.033 ± 0.005 | |
| 40 | 0.035 ± 0.006 | |
| 90 | 1 | 10.45 ± 0.97 |
| 5 | 0.190 ± 0.03 | |
| 10 | 0.072 ± 0.02 | |
| 20 | 0.018 ± 0.003 | |
| 30 | 0.022 ± 0.004 | |
| 40 | 0.024 ± 0.006 | |
| 105 | 1 | 23.02 ± 1.02 |