Summary of measured physical characteristics: Raman spectroscopy ID/IG-ratio, four-point probe sheet resistance (Ω □−1), and XPS wide scan atomic concentrations (at%).
| Fe at% | Raman ID/IG | Sheet resistance | XPS wide at% | ||
|---|---|---|---|---|---|
| Fe 2p | O 1s | C 1s | |||
| ta-C | 0.15 ± 0.08 | — | — | 4.2 ± 0.2 | 95.6 ± 0.2 |
| 2 | 0.22 ± 0.02 | 3.9 × 108 | 0.4 ± 0.0 | 5.7 ± 0.0 | 93.7 ± 0.1 |
| 5 | 0.25 ± 0.04 | 2.4 × 105 | 1.2 ± 0.0 | 7.5 ± 0.1 | 90.9 ± 0.1 |
| 10 | 0.37 ± 0.02 | 7.6 × 104 | 2.5 ± 0.0 | 10.6 ± 0.4 | 86.4 ± 0.6 |