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. 2022 May 13;12:7930. doi: 10.1038/s41598-022-11132-9

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Schematic diagram of the fabrication scheme based on the SU-8 microchannel (a) SAW device. (b) Photolithography of SU-8 microchannels on the substrate surface. (c) Coating silicon dioxide film on the upper surface of the microchannel. (d) Bonding the PDMS layer with the microchannel to form a closed microchannel.