Fig. 3. Vibration of individual piezoelectric domes and tunability enabled by the dome design.

a Electric potential distribution induced by uniform load (1 Pa) applied on a PVDF microdome. b Displacement distribution over a PVDF microdome under a 10 V voltage excitation. The electrical potential in a and the displacement in b are represented by the color in each figure. The simulated dome in a and b has a 350 μm radius, a 15 μm central height and a 12 μm film thickness. c–e Dependence of the dome deflection (solid curves) and the resonance frequency (dashed curves) on the dome radius R (c), film thickness h (d), and central dome height H (e). The deflections correspond to 10 V applied across the electrodes. Simulation in c either maintains a constant aspect ratio (H/R = 5%) or a constant central height (H = 15 μm) while scaling up the dome size. The simulation in d sets a constant central height of 15 μm, while that in e sets a constant film thickness of 12 μm. The PVDF used in the simulation is uniaxial with d₃₁ = 22 pC/N.