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The phase, crystal form and average crystallite size of TiO2 thin films at different annealing temperature.
| Annealed temperature (C) | Phase | Crystallinity | Average crystalline size (nm) |
|---|---|---|---|
| 400 | Anatase | Tetragonal | 4.77 |
| 600 | Anatase | Tetragonal | 19.49 |
| Rutile | Tetragonal | 30.61 | |
| 800 | Anatase | Tetragonal | 23.95 |
| Rutile | Tetragonal | 34.59 |
