Figure 5.
Magnetic curves of the PowderMEMS micromagnets, fabricated using NdFeB powder of particle sizes d50 = 5 µm (NdFeB5) and d50 = 25 µm (NdFeB25). Hysteresis loops of the micromagnets measured in direction of (a) x-axis and (b) z-axis at room temperature. (c) Cross-sectional schematic of the measured micromagnet structure.