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A 2-DoF electrostatically coupled BAW disk resonator system operating in different modes simulated in COMSOL. (a) Out-of-phase mode 1; (b) In-phase mode 1; (c) Out-of-phase mode 2 (WG mode); (d) In-phase mode 2 (WG mode). The deformation of resonators is magnified. In reality, the frequencies of the two modes are prone to be aliased due to the limited Q factor.
