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. 2022 May 19;22(10):3857. doi: 10.3390/s22103857

Figure 18.

Figure 18

The frequency response measured for a BAW resonator with square extensional (SE) mode in the air (Adapted with permission from Ref. [95]). (a) One-port capacitive actuation and sensing method; (b) One-port capacitive actuation and piezoresistive sensing method.