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. 2022 May 19;22(10):3857. doi: 10.3390/s22103857

Figure 20.

Figure 20

(a) FEM simulation of 2-DoF BAW disk resonators with in-phase extensional mode shown; (b) SEM image of the fabricated 2-DoF BAW disk resonators with capacitive actuation and piezoresistive sensing. Reprinted with permission from Ref. [38].