Skip to main content
. 2022 May 19;22(10):3857. doi: 10.3390/s22103857

Figure 22.

Figure 22

Schematic of the piezoelectric transduction mechanism applied to a 2-DoF weakly coupled BAW square-plate resonator device vibrating at in-phase and out-of-phase WG modes. The mass perturbation is conducted by applying particles onto the bottom surface of the resonators. Reprinted with permission from Ref. [42].