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(a) Schematic of a 1-DoF capacitive-piezo disk resonator operated at the radial contour mode with the anchor at the center (Reprinted with permission from Ref. [115]); (b) Schematic of a 2-DoF capacitive-piezo disk resonator device operated at the WG mode with the anchor connected to the resonator body by a suspension beam (Reprinted with permission from Ref. [114]).
