Figure 25.
(a) Optical micrograph of the 2-DoF BAW resonator system; (b) Comparison between the analytical frequency shift and the measured one with respect to the deposited Cr film thickness. Reprinted with permission from Ref. [39].
(a) Optical micrograph of the 2-DoF BAW resonator system; (b) Comparison between the analytical frequency shift and the measured one with respect to the deposited Cr film thickness. Reprinted with permission from Ref. [39].