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. 2022 May 19;22(10):3857. doi: 10.3390/s22103857

Figure 29.

Figure 29

(a) Comparison of Q factors among the single, 2-DoF and 3-DoF square-plate BAW resonators as the drain current (Reprinted with permission from Ref. [37]); (b) Comparison of Q factors between the single and 2-DoF disk BAW resonators with bias current increasing (Reprinted with permission from Ref. [38]).