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. 2022 May 19;22(10):3857. doi: 10.3390/s22103857

Figure 30.

Figure 30

(a) SEM image of a 7-DoF strongly coupled BAW resonator system with anchors at the center; (b) FEM simulated out-of-plane motion of the coupled resonator systems; (c) Frequency response of several multi-DoF coupled resonators. Reprinted with permission from Ref. [37].