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. 2022 May 19;22(10):3857. doi: 10.3390/s22103857

Figure 32.

Figure 32

(a) Schematic and SEM image of a 2-DoF and 96-DoF coupled BAW disk resonator filter system; (b) Revised schematic of the out-of-phase radial contour mode shape; (c) Revised schematic of the in-phase radial contour mode shape. Adapted with permission from Ref. [80].