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Dimensions and materials of a 2-DoF coupled BAW square plate resonator system modeled in COMSOL (Adapted with permission from Ref. [26]).
| Parameters | Value |
|---|---|
| Length of the square plate (μm) | 800 |
| Thickness of the device (μm) | 25 |
| Length and width of the stem (μm) | 67.2 and 14.1 |
| Length and width of the cap (μm) | 70.7 and 10.6 |
| Length and width of the coupling beam (μm) | 400 and 14 |
| Materials selection for FEM simulation | Single crystal silicon (SCS) |
