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The in-phase and out-of-phase mode resonant frequencies of a 2-DoF coupled BAW square plate resonator system with the same mechanical coupling beam located at different positions obtained by FEM simulation in COMSOL.
| Location of Coupling Beam | In-Phase Mode (Hz) | Out-of-Phase Mode (Hz) | Frequency Difference |
|---|---|---|---|
| y = 0 μm | 4,702,389 | 4,769,160.74 | 1.42% |
| y = −100 μm | 4,704,931.73 | 4,762,091 | 1.21% |
| y = −200 μm | 4,711,448.66 | 4,746,444.54 | 0.74% |
| y = −300 μm | 4,717,826.99 | 4,730,406.99 | 0.27% |
