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Dimensions and materials of a 2-DoF electrostatically coupled BAW square resonator system modeled in COMSOL.
| Parameters | Value |
|---|---|
| Diameter of the disk plate (μm) | 1500 |
| Thickness of the device (μm) | 30 |
| Lateral transduction gap (μm) | 2 |
| Length and width of the stem (μm) | 225 and 37.5 |
| Length and width of the convex plate (μm) | 5.5 and 450 |
| Materials selection for FEM simulation | Single crystal silicon (SCS) |
