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Differences in resonant frequencies of a 2-DoF electrostatically coupled BAW disk resonator system operated at different vibrational modes obtained by FEM simulation in COMSOL.
| Vibration Modes | Out-of-Phase Mode (Hz) | In-Phase Mode (Hz) | Frequency Difference |
|---|---|---|---|
| Mode 1 | 365,455.475 | 365,537.439 | 0.02% |
| Mode 2 (WG mode) | 2,654,149.09 | 2,654,150.75 | 0.00006% |
