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. 2022 May 19;22(10):3857. doi: 10.3390/s22103857

Table 6.

Differences in resonant frequencies of a 2-DoF mechanically coupled BAW square resonator system operated at different vibrational modes obtained by FEM simulation in COMSOL.

Vibrational Modes In-Phase Mode (Hz) Out-of-Phase Mode (Hz) Frequency Difference
Mode 1 381,093.019 411,584.939 8%
Mode 2 (WG mode) 4,711,448.66 4,746,444.54 0.74%