Table 9.
Performance comparison of the reported 2-DoF coupled BAW MEMS resonators as mass sensors.
| References | [39] | [40] | [41,42] |
|---|---|---|---|
| Vibration mode | Extensional mode | Extensional mode | WG mode |
| Actuation way | Capacitive | Capacitive | Piezoelectric |
| Sensing way | Piezoresistive | Piezoresistive | Piezoelectric |
| Frequency (MHz) | 5.492, 5.423 | 5.492; 3.145 | ~2.5 |
| Q factors | 5139, 8505 | 5139; 8676 | 1773.8 |
| Mass perturbation | Cr film | Microbeads and cells | Particles |
| Characterize sensitivity | Frequency shift | Frequency shift | Frequency shift; AR shift |
| Sensitivity | 34 Hz/ng | −12 Hz/cell | 0.0735; 148.22 |
| Detection limit | Not mentioned | 1.46/36 ng/cm2; ~1.68 dried cells |
Not mentioned |