| Magnetorheological finishing | MRF |
| Magnetic compound fluid | MCF |
| Chemical mechanical polishing | CMP |
| Material removal rate | MRR |
| Scanning electron microscopy | SEM |
| Magnetorheological finishing | MRF |
| Magnetic compound fluid | MCF |
| Chemical mechanical polishing | CMP |
| Material removal rate | MRR |
| Scanning electron microscopy | SEM |