Table 2.
Characteristics of the classes of defects obtained by COMSOL® Multiphysics.
| Class | Radius | Number of EC Maps |
|---|---|---|
| Class #1 | 0.1 mm | 324 |
| Class #2 | 0.2 mm | 332 |
| Class #3 | 0.3 mm | 350 |
| Class #4 | 0.4 mm | 326 |
| Class #5 | 0.5 mm | 329 |
| Class #6 | 0.6 mm | 327 |
| Class #7 | 0.7 mm | 326 |
| Class #8 | 0.8 mm | 329 |
| Class #9 | 0.9 mm | 333 |
| Class #10 | 1 mm | 334 |
| Class ND | without defects | 342 |