Figure 4.

X‐ray microscopic imaging system and resolution. a) Schematic of the X‐ray microscopic imaging system. b,c) SEM images of the line pair card. d,e) X‐ray microscopic images of the line pair card and f) modulation transfer function (MTF) curve of the X‐ray microscopic imaging system using an objective lens with magnification of 40. The thickness of scintillator film used in this imaging system is 30 µm. g,h) The X‐ray microscopic images of the center area of the line pair card. i) The change of gray value along the line in e).